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Tour-U.com
  STG Dryer
Cost Savings.
  • Improved cycle time.
  • Reduced Maintenance.
Simple and reliable design.
  • 18-month warranty.
Reduced Chemical Consumption.
  • Virtually eliminates VOC (Volatile Organic Compound) emissions.
  • <45 ppm of IPA per cycle.
  • Reduced bulk fill requirements.
50 wafers – 200mm.
  • H2O consumption – 16 gallons (16.48 l.).
  • Nitrogen Consumption – 40 scf.
  • IPA Consumption – 3 ml.
Operating Characteristics.
  • Pressure Drop (Water, 20°C) – 1.6 psi/gpm (0.4 psi/liter).
  • Maximum Operating Temperature – 120°F (50°C).
  • Differential Pressure – 80 psi at 120°F (4 bar @ 50°C).
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