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Tour-U.com
 Recirculation
Features
- In-bath chemical blend
- Chemical spiking
- Temperatures available to 200°C.
- Process baths in PFA, PVDF, Quartz, and Electro polished SS.
- Temperature control ± 0.5°C
Advantage
- Chemical filtration.
- Temperature Control.
- Better Etch rate control.
- Extended bath life.
- Can eliminate product agitation requirements.
Options
- Megasonics.
- Ultrasonics.
- Chemical concentration control.
Applications
- Piranha, SC1 and SC2 cleans.
- Solvent cleaning.
- Nitride Etch.
- HF/BOE Etch.
- Develop.
- Plating.
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